TY  - BOOK
AU  - Yamada,Isao
TI  - Materials processing by cluster ion beams: history, technology, and applications 
SN  - 9781498711753
PY  - 2015///
CY  - Boca Raton, FL
PB  - CRC Press
KW  - Materials
KW  - Effect of radiation on
KW  - Ion bombardment
KW  - Nanostructured materials
KW  - Silicon
N1  - Includes bibliographical references and index
ER  -