Instrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors VII :  28 August, San Diego, California, United States / 
Michael T. Postek, Ndubuisi G. Orji, editors 
 - Bellingham, Washington :  SPIE,  2013 
 - 1 v. (various pagings) :  ill. ;  28 cm. 
 - Proceedings of SPIE,  v. 8819  0277-786X ; .
 - Proceedings of SPIE,  v. 8819 .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780819496690 0819496693 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Nanostructured materials--Congresses<br/>Microfabrication--Congresses<br/>Nanotechnology--Congresses