01185nam a2200289 4500 vtls000085950 KUKTEM 20251125102917.0 150417t2013 waua f 001 0 eng d 9780819496690 0819496693 201509031539 asma 201504171604 ezzatul UMP T174.7 .I57 2013 Instrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors VII : 28 August, San Diego, California, United States / Michael T. Postek, Ndubuisi G. Orji, editors Bellingham, Washington : SPIE, 2013 1 v. (various pagings) : ill. ; 28 cm. Proceedings of SPIE, 0277-786X ; v. 8819 Includes bibliographical references and index Nanostructured materials Congresses Microfabrication Congresses Nanotechnology Congresses Postek, Michael T. Orji, Ndubuisi George Proceedings of SPIE, 0277-786X ; v. 8819 0 0 0 0 20000 20000 2019-09-04 201.39 0 T174.7 .I57 2013 0000100382 2019-09-04 00:00:00 1 201.39 2019-09-04 OPEN VIRTUA40 80656 80662 VTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*7000*7001*8300*9992