TY  - BOOK
AU  - Postek,Michael T.
AU  - Orji,Ndubuisi George
TI  - Instrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors VII: 28 August, San Diego, California, United States 
T2  - Proceedings of SPIE,
SN  - 9780819496690
PY  - 2013///
CY  - Bellingham, Washington
PB  - SPIE
KW  - Nanostructured materials
KW  - Congresses
KW  - Microfabrication
KW  - Nanotechnology
N1  - Includes bibliographical references and index
ER  -