01306nam a2200253 a 4500 vtls000092597 KUKTEM 20251125102937.0 151203t2014 si a f 001 0 eng d 9789814411066 (hbk.) 201602041017 saini 201512031101 azli UMP TK7875 .L39 2014 Lawes, Ronald A. MEMS cost analysis : from laboratory to industry / Ron Lawes Microelectromechanical systems cost analysis Singapore : Pan Stanford, 2014 xvi, 289 p. : ill. ; 24 cm. Includes bibliographical references and index 1. The world of MEMS -- 2. Basic fabrication processes -- 3. Surface micromachining -- 4. High-aspect-ratio micromachining -- 5. MEMS testing -- 6. MEMS packaging -- 7. Clean rooms, buildings and plant -- 8. The MEMSCOST spreadsheet -- 9. Product costs : accelerometers -- 10. Product costs : microphones -- 11. MEMS foundries -- 12. Financial reporting and analysis -- 13. Conclusions Microelectromechanical systems Design and construction Costs Microelectromechanical systems industry Costs 0 0 0 0 20000 20000 2019-09-04 600.26 0 TK7875 .L39 2014 0000106961 2019-09-04 00:00:00 1 600.26 2019-09-04 OPEN VIRTUA40 80949 80955 VTLSSORT0080*0200*0400*0900*1000*2450*2460*2600*3000*5040*5050*6500*6501*9992