MEMS cost analysis
from laboratory to industry
Microelectromechanical systems cost analysis
Lawes, Ronald A.
creator
text
si
Singapore
Pan Stanford
2014
monographic
eng
xvi, 289 p. : ill. ; 24 cm.
1. The world of MEMS -- 2. Basic fabrication processes -- 3. Surface micromachining -- 4. High-aspect-ratio micromachining -- 5. MEMS testing -- 6. MEMS packaging -- 7. Clean rooms, buildings and plant -- 8. The MEMSCOST spreadsheet -- 9. Product costs : accelerometers -- 10. Product costs : microphones -- 11. MEMS foundries -- 12. Financial reporting and analysis -- 13. Conclusions
specialized
Ron Lawes
Includes bibliographical references and index
Microelectromechanical systems
Design and construction
Costs
Microelectromechanical systems industry
Costs
9789814411066 (hbk.)
UMP
151203
20251125102937.0
vtls000092597