TY  - BOOK
AU  - Lawes,Ronald A.
TI  - MEMS cost analysis: from laboratory to industry 
SN  - 9789814411066 (hbk.)
PY  - 2014///
CY  - Singapore
PB  - Pan Stanford
KW  - Microelectromechanical systems
KW  - Design and construction
KW  - Costs
KW  - Microelectromechanical systems industry
N1  - Includes bibliographical references and index; 1. The world of MEMS -- 2. Basic fabrication processes -- 3. Surface micromachining -- 4. High-aspect-ratio micromachining -- 5. MEMS testing -- 6. MEMS packaging -- 7. Clean rooms, buildings and plant -- 8. The MEMSCOST spreadsheet -- 9. Product costs : accelerometers -- 10. Product costs : microphones -- 11. MEMS foundries -- 12. Financial reporting and analysis -- 13. Conclusions
ER  -