00962nam a2200193 a 4500001001400000003000700014005001700021008004100038020002500079040000800104100001900112245007800131260003900209300003500248504005000283505040400333650001400737700001700751vtls000092880KUKTEM20251125103025.0151203t2014    flua   f      001 0 eng d  a9781466556447 (hbk.)  aUMP1 aTan, Kok Kiong10aModeling and control of precision actuators /cTan Kok Kiong, Huang Sunan  aBoca Raton, FL :bCRC Press,c2014  axvii, 251 p. :bill. ;c24 cm.  aIncludes bibliographical references and index0 aIntroduction -- Nonlinear dynamics and modeling -- Identification and compensation of preisach hysteresis in piezoelectric actuators -- Identification and compensation of friction and ripple force -- Model predictive control of precise actuators -- Modeling and control of air bearing stages -- Fault detection and accommodation in actuators -- Case studies of precise actuator applications -- Index 0aActuators1 aHuang, Sunan