Novel advances in microsystems technologies and their applications / 
edited by Laurent A. Francis, Krzysztof Iniewski 
 - Boca Raton :  CRC Press,  2014 
 - xix, 613 p. :  ill. ;  24 cm. 
 - Devices, circuits, and systems .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9781466560666 (hbk.) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics