Smart sensors and MEMS :  intelligent devices and microsystems for industrial applications / 
edited by Stoyan Nihtianov and Antonio Luque 
 - Oxford, UK :  Woodhead Publishing,  2014 
 - xxii, 538 p. :  ill. ;  24 cm. 
 - Woodhead Publishing series in electronic and optical materials,  v. 51  2050-1501 ; .
 - Woodhead Publishing series in electronic and optical materials,  v. 51 .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780857095022 (hbk.) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Detectors--Industrial applications<br/>Microelectromechanical systems--Industrial applications