TY  - BOOK
AU  - Nihtianov,Stoyan
AU  - Luque,A.
TI  - Smart sensors and MEMS: intelligent devices and microsystems for industrial applications 
T2  - Woodhead Publishing series in electronic and optical materials,
SN  - 9780857095022 (hbk.)
PY  - 2014///
CY  - Oxford, UK
PB  - Woodhead Publishing
KW  - Detectors
KW  - Industrial applications
KW  - Microelectromechanical systems
N1  - Includes bibliographical references and index
ER  -