Nakamura, Kenichiro <br/><br/>
Photopolymers :  photoresist materials, processes, and applications / 
Kenichiro Nakamura 
 - Boca Raton, FL :  CRC Press,  c2015 
 - ix, 179 p. :  ill. ;  24 cm. 
 - Optics and photonics ;  v. 10 .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9781466517288 (hbk.) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Photopolymers<br/>Photoresists<br/>Photopolymerization<br/>Photopolymers--Industrial applications<br/>Microelectronics--Materials