TY  - BOOK
AU  - Nakamura,Kenichiro
TI  - Photopolymers: photoresist materials, processes, and applications 
T2  - Optics and photonics
SN  - 9781466517288 (hbk.)
PY  - 2015///
CY  - Boca Raton, FL
PB  - CRC Press
KW  - Photopolymers
KW  - Photoresists
KW  - Photopolymerization
KW  - Industrial applications
KW  - Microelectronics
KW  - Materials
N1  - Includes bibliographical references and index
ER  -