Roy, Sunipa <br/><br/>
MEMS and nanotechnology for gas sensors / 
Sunipa Roy and Chandan Kumar Sarkar 
 - Boca Raton, FL :  CRC Press, Taylor & Francis Group,  2016 
 - xvii, 224 p. :  ill. ;  24 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9781498700122 (hbk.) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Gas detectors--‬Design and construction<br/>Microelectromechanical systems--Design and construction<br/>Microfabrication<br/>Nanomanufacturing