TY  - BOOK
AU  - Roy,Sunipa
AU  - Sarkar,Chandan Kumar
TI  - MEMS and nanotechnology for gas sensors
SN  - 9781498700122 (hbk.)
PY  - 2016///
CY  - Boca Raton, FL
PB  - CRC Press, Taylor & Francis Group
KW  - Gas detectors
KW  - ‬Design and construction
KW  - Microelectromechanical systems
KW  - Design and construction
KW  - Microfabrication
KW  - Nanomanufacturing
N1  - Includes bibliographical references and index
ER  -