Nanoscale silicon devices / 
edited by Shunri Oda, David K. Ferry 
 - Boca Raton :  CRC Press,  2016 
 - xi, 288 p. :  ill. ;  24 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9781482228670 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Nanoelectromechanical systems<br/>Nanotechnology<br/>Silicon crystals--Electric properties