TY  - BOOK
AU  - Oda,Shunri
AU  - Ferry,David K.
TI  - Nanoscale silicon devices
SN  - 9781482228670
PY  - 2016///
CY  - Boca Raton
PB  - CRC Press
KW  - Nanoelectromechanical systems
KW  - Nanotechnology
KW  - Silicon crystals
KW  - Electric properties
N1  - Includes bibliographical references and index
ER  -