Eranna, G.

Crystal growth and evaluation of silicon for VLSI and ULSI / Golla Eranna - Boca Raton : CRC Press, Taylor & Francis Group, 2015 - xvii, 141 p. : ill. ; 26 cm.

Includes bibliographical references and index

9781482232813 (hbk.) 1482232812


Integrated circuits--Ultra large scale integration--Materials
Silicon crystals--Testing
Crystal growth
Semiconductor wafers--Materials