Eranna, G. Crystal growth and evaluation of silicon for VLSI and ULSI / Golla Eranna - Boca Raton : CRC Press, Taylor & Francis Group, 2015 - xvii, 141 p. : ill. ; 26 cm. Includes bibliographical references and index ISBN: 9781482232813 (hbk.) 1482232812 Subjects--Topical Terms: Integrated circuits--Ultra large scale integration--MaterialsSilicon crystals--TestingCrystal growthSemiconductor wafers--Materials