TY  - BOOK
AU  - Eranna,G.
TI  - Crystal growth and evaluation of silicon for VLSI and ULSI
SN  - 9781482232813 (hbk.)
PY  - 2015///
CY  - Boca Raton
PB  - CRC Press, Taylor & Francis Group
KW  - Integrated circuits
KW  - Ultra large scale integration
KW  - Materials
KW  - Silicon crystals
KW  - Testing
KW  - Crystal growth
KW  - Semiconductor wafers
N1  - Includes bibliographical references and index
ER  -