TY - BOOK AU - Davim,J.Paulo TI - Microfabrication and precision engineering: research and development T2 - Woodhead Publishing in mechanical engineering SN - 9780857094858 PY - 2017/// CY - Duxford, UK PB - Woodhead Publishing KW - Production engineering KW - Microtechnology KW - Nanotechnology N1 - Includes bibliographical references and index ER -