00888nam a2200265 i 4500001001400000003000700014005001700021008004100038020002800079040002300107100002900130245009100159250001900250264001200269264004800281300004700329336002100376337002500397338002300422490003900445504005000484650002100534650002800555830003900583vtls000101914KUKTEM20251125103744.0171017t20162011ne a   f      001 0 eng d  a9780323378284qhardback  aUMPbengcUMPerda1 aLuttge, Regina,eauthor.10aNano- and microfabrication for industrial and biomedical applications /cRegina Luttge  aSecond Edition 4c© 2011 1aAmsterdam :bElsevier/William Andrew,c2016  axvii, 259 pages :billustrations ;c24 cm.  atext2rdacontent  aunmediated2rdamedia  avolume2rdacarrier1 aMicro and nano technologies series  aIncludes bibliographical references and index 0aMicrofabrication 0aManufacturing processes 0aMicro and nano technologies series