TY  - BOOK
AU  - Luttge,Regina
TI  - Nano- and microfabrication for industrial and biomedical applications
T2  - Micro and nano technologies series
SN  - 9780323378284
PY  - 2011///
KW  - Microfabrication
KW  - Manufacturing processes
N1  - Includes bibliographical references and index
ER  -