TY  - BOOK
AU  - Bachmann,Julien
TI  - Atomic layer deposition in energy conversion applications
SN  - 9783527339129
PY  - 2017///
CY  - Weinheim, Germany
PB  - Wiley-VCH
KW  - Atomic layer deposition
N1  - Includes bibliographical references and index
ER  -