Lee,	El-Hang, <br/><br/>
VLSI Micro- and nanophotonics: science, technology, and applications/ 
El-Hang Lee 
 - 1 online resource 
<br/><br/><label>ISBN: </label>9781315221328 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems -- Technological innovations.<br/>Nanophotonics -- Technological innovations.<br/>Integrated circuits -- Very large scale integration.