TY  - GEN
AU  - Lee,	El-Hang
TI  - VLSI Micro- and nanophotonics: science, technology, and applications
SN  - 9781315221328
PY  - 2010///
PB  - Boca Raton, FL : CRC Press
KW  - Microelectromechanical systems -- Technological innovations
KW  - Nanophotonics -- Technological innovations
KW  - Integrated circuits -- Very large scale integration
UR  - https://www-taylorfrancis-com.libraryumpsa.idm.oclc.org/books/9781315221328
UR  - https://www.taylorfrancis.com/books/9781315221328
ER  -