Smart sensors and MEMs :  intelligent devices iand microsystems for industrial applications / 
edited by Stoyan Nihtianov and Antonio Luque 
 - Second Edition 
 - 1 online resource 
<br/><br/> Perolehan buku elektronik ScienceDirect (OTP) - Areesh (Pembelian Pukal) 
<br/><br/><label>ISBN: </label>9780081020555 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Detectors<br/>Microelectromechanical systems<br/>Scanning systems