TY  - BOOK
AU  - Nihtianov,Stoyan
AU  - Luque,Antonio
TI  - Smart sensors and MEMs: intelligent devices iand microsystems for industrial applications 
SN  - 9780081020555
PY  - 2018///
CY  - Cambridge, MA
PB  - Woodhead Publishing
KW  - Detectors
KW  - Microelectromechanical systems
KW  - Scanning systems
N1  - Perolehan buku elektronik ScienceDirect (OTP) - Areesh (Pembelian Pukal)
UR  - https://www.sciencedirect.com.libraryumpsa.idm.oclc.org/book/9780081020555/smart-sensors-and-mems
UR  - https://www.sciencedirect.com/book/9780081020555/smart-sensors-and-mems
ER  -