@book{93492,
	author = {Di Barba, Paolo, and Wiak, S.,},
	title = {MEMS :},
	publisher = {Springer,},
	year = {2020},
	series = {Lecture notes in electrical engineering},
	address = {Cham, Switzerland :},
	url = {https://link-springer-com.libraryumpsa.idm.oclc.org/book/10.1007/978-3-030-21496-8}
}