Di Barba, Paolo, <br/><br/>
MEMS :  field models and optimal design / \ 
Paolo Di Barba, Slawomir Wiak 
 - 1 online resource 
 - Lecture notes in electrical engineering .
 - Lecture notes in electrical engineering .
<br/><br/>Includes bibliographical references 
<br/><br/><label>ISBN: </label>9783030214968 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems<br/>Microelectromechanical systems--Design and construction<br/>Microelectromechanical systems--Mathematical models