TY  - BOOK
AU  - Di Barba,Paolo
AU  - Wiak,S.
TI  - MEMS: field models and optimal design / \
T2  - Lecture notes in electrical engineering
SN  - 9783030214968
PY  - 2020///
CY  - Cham, Switzerland
PB  - Springer
KW  - Microelectromechanical systems
KW  - Design and construction
KW  - Mathematical models
N1  - Includes bibliographical references
UR  - https://link-springer-com.libraryumpsa.idm.oclc.org/book/10.1007/978-3-030-21496-8
UR  - https://www.springer.com/gp/book/9783030214951
ER  -