@book{93646,
	author = {Huff, Michael,},
	title = {Process variations in microsystems manufacturing /},
	publisher = {Springer,},
	year = {2020},
	series = {Microsystems and nanosystems},
	address = {Cham :},
	url = {https://link-springer-com.libraryumpsa.idm.oclc.org/book/10.1007/978-3-030-40560-1}
}