Huff, Michael, <br/><br/>
Process variations in microsystems manufacturing / 
Michael Huff 
 - 1 online resource 
 - Microsystems and nanosystems .
 - Microsystems and nanosystems .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9783030405601 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems