TY  - BOOK
AU  - Huff,Michael
TI  - Process variations in microsystems manufacturing
T2  - Microsystems and nanosystems
SN  - 9783030405601
PY  - 2020///
CY  - Cham
PB  - Springer
KW  - Microelectromechanical systems
N1  - Includes bibliographical references and index
UR  - https://link-springer-com.libraryumpsa.idm.oclc.org/book/10.1007/978-3-030-40560-1
UR  - https://link.springer.com/book/10.1007/978-3-030-40560-1
ER  -