@book{93920,
	author = {Keil, Sophia,},
	title = {Digital transformation in semiconductor manufacturing :},
	publisher = {Springer,},
	year = {2020},
	series = {Lecture notes in electrical engineering},
	address = {Cham :},
	url = {https://link-springer-com.libraryumpsa.idm.oclc.org/book/10.1007/978-3-030-48602-0}
}