@book{93973,
	author = {Barbillon, Gregory,},
	title = {Engineering of micro/nano biosystems :},
	publisher = {Springer,},
	year = {2020},
	series = {Microtechnology and MEMS},
	address = {Singapore :},
	url = {https://link-springer-com.libraryumpsa.idm.oclc.org/book/10.1007/978-981-13-6549-2}
}