Materials science in semiconductor processing /  . 
Kurbangali B. Tynyshtykbaev, Talant Aitmukan, et al 
 - ix, 190 pages  :  illustration;  31 cm 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9781788021470 1788021479 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors.<br/>Integrated circuits--Materials