00879nam a2200265 i 4500003000800000005001700008006001900025007000300044008004100047020002900088020002600117040002600143245010800169264005300277264001100330300004300341336002100384337002500405338002300430504005000453650002000503650003500523700003300558700002200591MY-KuUP20251125110246.0a||||fr|||| 001 0 ta230314t20172017-uka|||fr|||| 001 0 eng d  a9781788021470qpaperback  a1788021479qpaperback  aMalcatbengcUMPerda10aMaterials science in semiconductor processing /  .cKurbangali B. Tynyshtykbaev, Talant Aitmukan, et al 1aUnited Kingdom :bAuris Reference Limited,c2017 4c©2017  aix, 190 pages  :billustration;c31 cm  2rdacontentatext  2rdamediaaunmediated  2rdacarrieravolume  aIncludes bibliographical references and index 0aSemiconductors. 0aIntegrated circuitsxMaterials1 aTynyshtykbaev, Kurbangali B.1 aAitmukan, Talant.