TY  - BOOK
AU  - Tynyshtykbaev,Kurbangali B.
AU  - Aitmukan,Talant
TI  - Materials science in semiconductor processing /
SN  - 9781788021470
PY  - 2017///
CY  - United Kingdom
PB  - Auris Reference Limited
KW  - Semiconductors
KW  - Integrated circuits
KW  - Materials
N1  - Includes bibliographical references and index
ER  -