| 000 | 01129nam a2200301 i 4500 | ||
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| 003 | MY-KuUP | ||
| 005 | 20260225105025.0 | ||
| 006 | a||||fo|||| 000 0 | ||
| 007 | cr a|||||||||| | ||
| 008 | 260203s2025 si ||||fo|||| 000 0 eng d | ||
| 020 |
_a9789819661626 _qebook |
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| 040 |
_aUMPSA _beng _cUMPSA _erda |
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| 090 | _aTK7875 .S56 2025 | ||
| 100 | 1 |
_aSingh, Kamaljeet, _eauthor. |
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| 245 |
_aMicro Electro Mechanical System (MEMS) technology for multifaceted applications / _cKamaljeet Singh , Ayan Karmakar |
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| 264 | 1 |
_aSingapore : _bSpringer, _c2025 |
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| 300 | _a1 online resource | ||
| 336 |
_2rdacontent _atext |
||
| 337 |
_2rdamedia _acomputer |
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| 338 |
_2rdacarrier _aonline resource |
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| 347 |
_2rda _atext file _bPDF |
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| 504 | _aIncludes bibliographical references | ||
| 650 | 0 | _aMicroelectromechanical system | |
| 700 |
_aKarmakar, Ayan, _eauthor. |
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| 856 |
_zOff-Campus link _uhttps://link-springer-com.libraryumpsa.idm.oclc.org/book/10.1007/978-981-96-6162-6 |
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| 856 |
_zClick here to access (Direct Link) _uhttps://link.springer.com/openurl?genre=book&isbn=978-981-96-6162-6 |
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| 942 |
_2lcc _cEBOOK |
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| 999 |
_c104036 _d104042 |
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