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| 001 | vtls000005107 | ||
| 003 | KUKTEM | ||
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| 008 | 060606t2000 nyu f 001 0 eng d | ||
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_aHandbook of semiconductor manufacturing technology / _cedited by Yoshio Nishi, Robert Doering; assistant editor Tim Wooldridge |
| 260 |
_aNew York : _bMarcel Dekker, _c2000 |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aSemiconductors _xDesign and construction _vHandbooks, manuals, etc |
|
| 650 | 0 |
_aSemiconductor industry _vHandbooks, manuals, etc |
|
| 700 | 1 | _aNishi, Yoshio | |
| 700 | 1 | _aDoering, Robert | |
| 700 | 1 | _aWooldridge, Tim | |
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_aVIRTUA40 _c12381 _d12387 |
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