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| 001 | vtls000005098 | ||
| 003 | KUKTEM | ||
| 005 | 20251117141159.0 | ||
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| 039 | 9 |
_a201904301221 _bAUTHORITY _c201107131705 _dVLOAD _c200908141030 _dVLOAD _c200908141003 _dVLOAD _y200606141121 _zVLOAD |
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| 040 | _aUMP | ||
| 245 | 0 | 0 |
_aHandbook of photomask manufacturing technology / _c edited by Syed Rizvi |
| 260 |
_aBoca Raton: _bTaylor & Francis, _c 2005 |
||
| 300 |
_axxiii, 704 p.: _b ill.; _c 26 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | 0 |
_aMasks (Electronics) _xHandbooks, manuals, etc. |
| 700 | 1 | 2 | _aRizvi, Syed |
| 856 | 4 | 8 |
_y URL link _u http://www.loc.gov/catdir/toc/fy054/2004059306.html |
| 999 |
_c12483 _d12489 |
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