| 000 | 00970nam a2200241 a 4500 | ||
|---|---|---|---|
| 001 | vtls000010767 | ||
| 003 | KUKTEM | ||
| 005 | 20251117141208.0 | ||
| 008 | 060606t2005 nyua f 001 0 eng d | ||
| 020 | _a0071445595 | ||
| 020 | _a9780071445597 | ||
| 039 | 9 |
_a201207021606 _basmadi _c201206071330 _dFida _c201107131753 _dVLOAD _c200908141131 _dVLOAD _y200606141152 _zVLOAD |
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| 040 | _aUMP | ||
| 245 | 0 | 0 |
_aSemiconductor manufacturing handbook / _cHwaiyu Geng, editor-in-chief |
| 260 |
_aNew York : _bMcGraw-Hill, _c2005 |
||
| 300 |
_a1 v. (various pagings) : _bill. ; _c25 cm. |
||
| 490 | 0 | _aMcGraw-Hill handbooks | |
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aSemiconductors _xDesign and construction _vHandbooks, manuals, etc. |
|
| 650 | 0 |
_aIntegrated circuits _xDesign and construction _vHandbooks, manuals, etc. |
|
| 700 | 1 | _aGeng, Hwaiyu | |
| 999 |
_aVIRTUA40 _c12762 _d12768 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*7000*9992 | ||