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_aMEMS/NEMS handbook : _btechniques and applications / _cedited by Cornelius T. Leondes |
| 260 |
_aNew York : _bSpringer, _c2006 |
||
| 300 |
_a5v. : _bill. ; _c25 cm. |
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| 505 | _av. 1. Design methods -- v. 2. Fabrication techniques -- v. 3. Manufacturing methods -- v. 4. Sensors and actuators -- v. 5. Medical applications and MOEMS | ||
| 650 | 0 |
_aMicroelectromechanical systems _xDesign and construction |
|
| 650 | 0 | _aNanotechnology | |
| 700 | 1 | _aLeondes, Cornelius | |
| 856 | 4 | 2 | _ahttp://www.loc.gov/catdir/enhancements/fy0663/2005042621-d.html |
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