| 000 | 00864nam a2200217 a 4500 | ||
|---|---|---|---|
| 001 | vtls000017470 | ||
| 003 | KUKTEM | ||
| 005 | 20251117141220.0 | ||
| 008 | 070117 000 0 eng d | ||
| 020 | _a8179924750 | ||
| 039 | 9 |
_a201107131856 _bVLOAD _c200908141253 _dVLOAD _c200908141225 _dVLOAD _c200908131647 _dVLOAD _y200701171002 _zfarina |
|
| 040 | _aUMP | ||
| 245 | 1 |
_aHandbook of VLSI microlithography : _bprinciples, technology, and applications / _cedited by John Helbert. |
|
| 260 |
_aMumbai ; _aDelhi : _bJaico Publishing House, _c2005 |
||
| 300 |
_axix, 1001 p. : _bill. ; _c25 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aIntegrated circuits _xVery large scale integration |
|
| 650 | 0 | _aMicrolithography | |
| 700 | 1 | _aHelbert, John N. | |
| 999 |
_aVIRTUA _c13083 _d13089 |
||
| 999 | _aVTLSSORT0080*0200*0900*2450*2600*3000*5040*6500*6501*7000*9991 | ||