| 000 | 01142nam a2200265 a 4500 | ||
|---|---|---|---|
| 001 | vtls000029855 | ||
| 003 | KUKTEM | ||
| 005 | 20251117141236.0 | ||
| 008 | 080701s2008 flua bf 001 0 eng | ||
| 020 | _a574446754 (alk. paper) | ||
| 020 | _a9781574446753 (alk. paper) | ||
| 039 | 9 |
_a201107132027 _bVLOAD _c200908141454 _dVLOAD _c200908141425 _dVLOAD _c200908131802 _dVLOAD _y200807010913 _znorsaini |
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| 040 | _aUMP | ||
| 245 | 0 | 0 |
_aHandbook of semiconductor manufacturing technology / _cedited by Robert Doering, Yoshio Nishi. |
| 250 | _a2nd ed. | ||
| 260 |
_aBoca Raton : _bCRC Press, _cc2008. |
||
| 300 |
_a1 v. (various pagings) : _bill. ; _c27 cm. |
||
| 500 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aSemiconductors _xDesign and construction _vHandbooks, manuals, etc |
|
| 650 | 0 |
_aSemiconductor industry _vHandbooks, manuals, etc. |
|
| 700 | 1 |
_aDoering, Robert, _d1946- |
|
| 700 | 1 |
_aNishi, Yoshio, _d1940- |
|
| 856 | 4 | 1 |
_3Table of contents only _uhttp://www.loc.gov/catdir/toc/ecip077/2006102599.html |
| 999 |
_aVIRTUA40 _c13552 _d13558 |
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