| 000 | 00795nam a2200217 a 4500 | ||
|---|---|---|---|
| 001 | vtls000059931 | ||
| 003 | KUKTEM | ||
| 005 | 20251117141305.0 | ||
| 008 | 120522t2015 gw a f 001 0 eng d | ||
| 020 | _a9783642054297 (hbk.) | ||
| 039 | 9 |
_a201904251619 _bAUTHORITY _c201601111035 _dsaini _c201601111034 _dsaini _y201205221043 _zfarina |
|
| 040 | _aUMP | ||
| 245 | 0 | 0 |
_aHandbook of thin film technology / _cHartmut Frey, H.R. Khan, editors |
| 260 |
_aBerlin : _bSpringer, _c2015 |
||
| 300 |
_axiii, 379 p. : _bill. (some col.) ; _c26 cm. |
||
| 504 | _aIncludes biblographical references and index | ||
| 650 | 0 |
_aThin films _vHandbooks, manuals, etc. |
|
| 700 | 1 | _aFrey, Hartmut | |
| 700 | 1 | _aKhan, H. R. | |
| 999 |
_aVIRTUA40 _c14372 _d14378 |
||
| 999 | _aVTLSSORT0080*0200*0400*0900*2450*2600*3000*5040*6500*7000*7001*9992 | ||