000			01338nam a2200313 a 4500
001			vtls000066946
003			KUKTEM
005			20251117141328.0
008			121127t2011 maua f 001 0 eng d
020			_a9781437778854 (v.3)
020			_a9781437778830 (v.4)
020			_a9781437778816 (v.5)
020			_a9780323313032 (v. 7)
039		9	_a201511241620 _bsaini _c201306201130 _dsaini _c201306191125 _djamie _c201306191124 _djamie _y201211271201 _zida
040			_aUMP
245	0	0	_aDevelopments in surface contamination and cleaning / _ceditors by Rajiv Kohli, Kashmiri L. Mittal
260			_aWaltham, MA : _bWilliam Andrew, _c<2011->
300			_av. <3-5, 7> : _bill. ; _c24 cm.
504			_aIncludes bibliographical references and index
505	1		_av. 3. Methods for removal of particle contaminants -- v. 4. Detection, characterization, and analysis of contaminants -- v. 5. Contaminant removal and monitoring -- v. 7 Cleanliness validation and verification
650		0	_aSurfaces (Technology)
650		0	_aSurface contamination _xPrevention
650		0	_aParticles _xMeasurement
650		0	_aCleaning
650		0	_aCoatings
700	1		_aKohli, Rajiv
700	1		_aMittal, K. L.
999			_aVIRTUA40 _c14971 _d14977
999			_aVTLSSORT0080*0200*0201*0202*0203*0400*0900*2450*2600*3000*5040*5050*6500*6501*6502*6503*6504*7000*7001*9992