| 000 | 01218nam a2200253 a 4500 | ||
|---|---|---|---|
| 001 | vtls000087508 | ||
| 003 | KUKTEM | ||
| 005 | 20251117141349.0 | ||
| 008 | 150602t2015 xxka f 001 0 eng d | ||
| 020 | _a9781781546994 | ||
| 039 | 9 |
_a201510121220 _bsaini _c201510121216 _dsaini _y201506021053 _zezzatul |
|
| 040 | _aUMP | ||
| 245 | 0 | 0 |
_aEncyclopaedia of manufacturing techniques for microfabrication and nanotechnology / _ccontributors, Guomin Jiang ... [et al.] ; edited and compiled by Auris Reference Editorial Board |
| 260 |
_aLondon, UK : _bAuris Reference, _c2015 |
||
| 300 |
_a4 v. : _bill. (some col.) ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 505 | 0 | _aV.1: Fundamentals techniques in microfabrication and nanotechnology -- v.2: Microfabrication for industrial applications -- v.3: Emerging technologies in micro-nanotechnology products -- v.4: Micro and nanotechnology for space systems | |
| 650 | 0 | _aManufacturing processes | |
| 650 | 0 | _aMicrofabrication | |
| 650 | 0 | _aNanotechnology | |
| 700 | 1 | _aJiang, Guomin | |
| 710 | 2 | _aAuris Reference Editorial Board | |
| 999 |
_aVIRTUA40 _c15532 _d15538 |
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| 999 | _aVTLSSORT0080*0200*0400*0900*2450*2600*3000*5040*5050*6500*6501*6502*7000*7100*9992 | ||