000 00838nam a2200229 a 4500
001 vtls000092689
003 KUKTEM
005 20251117141352.0
008 151203t2015 flua f 001 0 eng d
020 _a9781466573598
039 9 _a201602231612
_bzul
_c201602041629
_dzul
_y201512031201
_znadia
040 _aUMP
245 1 0 _aHandbook of optical metrology :
_bprinciples and applications /
_cedited by Toru Yoshizawa
250 _a2nd ed.
260 _aBoca Raton :
_bCRC Press,
_c2015
300 _axiii, 905 p. :
_bill. ;
_c26 cm.
504 _aIncludes bibliographical references and index
650 0 _aOptical measurements
_vHandbooks, manuals, etc.
650 0 _aMetrology
_vHandbooks, manuals, etc.
700 1 _aYoshizawa, Tōru
999 _aVIRTUA40
_c15607
_d15613
999 _aVTLSSORT0080*0200*0400*0900*2450*2500*2600*3000*5040*6500*6501*7000*9992