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| 007 | cr cnu---unuuu | ||
| 008 | 110110t2010 nyua fob 001 0 eng d | ||
| 020 | _a9780071627924 (NetLibrary e-ISBN) | ||
| 020 | _a0071627928 (NetLibrary e-ISBN) | ||
| 020 | _a9780071741835 (McGraw-Hill e-ISBN) | ||
| 020 | _a0071741836 (McGraw-Hill e-ISBN) | ||
| 020 | _z9780071626231 (alk. paper) | ||
| 020 | _z0071626239 (alk. paper) | ||
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_a201107131700 _bVLOAD _c201104270930 _dida _c201104261556 _djamie _y201101101219 _zida _wimport 2.mrk _x492 |
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| 040 | _aUMP | ||
| 090 | _aTK7875 .A39 2010 | ||
| 245 | 0 | 0 |
_aAdvanced MEMS packaging _h[electronic resource] / _cJohn H. Lau ... [et al.] |
| 260 |
_aNew York : _bMcGraw-Hill, _cc2010 |
||
| 300 |
_a1 online resource (xxiii, 552 p.) : _bill. |
||
| 500 | _aDescription based on print version record | ||
| 504 | _aIncludes bibliographical references and index | ||
| 505 | 0 | _aEnabling technologies for advanced MEMS packaging -- Advanced MEMS wafer-level packaging -- Optical MEMS packaging : communications -- Optical MEMS packaging : bubble switch -- Optical MEMS : microbolometer packaging -- Bio-MEMS packaging -- Biosensor packaging -- Accelerometer packaging -- Radiofrequency MEMS switches -- RF MEMS tunable capacitors and tubable band-pass filters -- Advanced packaging of RF MEMS devices | |
| 538 | _aMode of acceess : Internet | ||
| 650 | 0 | _aMicroelectromechanical systems | |
| 650 | 0 | _aMicroelectronic packaging | |
| 700 | 1 | _aLau, John H. | |
| 856 | 4 | 0 |
_3NetLibrary _uhttp://www.netlibrary.com.libraryumpsa.idm.oclc.org/urlapi.asp?action=summary&v=1&bookid=291511 |
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